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Tantalum tubes are specialized products made from tantalum, a rare, hard, blue-gray, lustrous transition metal that is highly corrosion-resistant. Tantalum is known for its excellent physical and chemical properties, including high melting point, low vapor pressure, good thermal conductivity, and exceptional resistance to attack by acids and liquid metals. These properties make tantalum and its products, like tantalum tubes, highly valuable in various industrial and technological applications.
CVD Process: In CVD, gases react or decompose on the surface of the semiconductor wafer to form a solid material. Tantalum tubes are used as reaction chambers or as components within the gas delivery systems. Their corrosion resistance is crucial, as the CVD process often involves corrosive gases and high temperatures. Tantalum’s ability to withstand these conditions ensures the purity of the deposited films and the integrity of the process equipment.
PVD Process: PVD involves the physical transfer of material from a source to the substrate. Tantalum tubes can be used as sputtering targets or as components in the vacuum systems. Their high melting point and thermal stability are essential for maintaining consistent deposition rates and film properties under the high-temperature conditions typical of PVD processes.
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